ASML新一代高NA EUV光刻机造价2500亿:Intel一年赚的钱不够买一台 - 快科技
荷兰ASML(阿斯麦)正在全力研制划时代的新光刻机high-NA EUV设备。所谓high-NA即高数值孔径,从当前的0.33提升到0.55,从而允许更紧密的电路图案(2nm及?
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